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Proforma 300i晶圓片手動測試儀

發(fā)布于：2020-10-23 17:08:54

品牌名稱：MTI Instruments

重要參數(shù)：

手動非接觸

測量76~300mm直徑范圍

網(wǎng)口、RS232端口配置

可選校準晶圓

軟件界面設(shè)置簡單

  • 產(chǎn)品詳情

  • Front USB port enables easy storage of measurements and other data to flash drives

  • MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability

  • Non-contact measurements

  • 76-300 mm diameter wafer range

  • Optional wafer measurement rings

  • Wafer stops for exact centering

  • Ethernet interface

  • Full remote control software (Windows compatible)

  • Optional calibration wafers


P/NModelMeasurement RangeAccuracyResolutionInterfaceTypeFrequency Response
8000-6760-001Proforma 300i1700μm (66.9mil/s)±0.25 μm0.05μmRS232 and EthernetDesktop System16.6Hz
8000-6760-002Proforma 300Gi1700μm (66.9mil/s)±0.25 μm0.05μmRS232 and EthernetDesktop System16.6Hz


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